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NASClean – Ultra-clean, ultra high-precision all metal gas filter for the semiconductor industry.
NASclean is a thin metal membrane filter made of sintered stainless steel (AISI 316L) short fibers on the order of microns in diameter. Consisting of fibrous material with a fixed aspect ratio, the membrane filter has uniformly distributed ultra-fine pores averaging 1um in diameter, with high porosity of some 60%. These features keep pressure loss low, while providing unprecedented microfiltering area and complete particle removing capability.
 Features of NASclean
- Superior particle removal capability
- Low pressure loss
- Good rectification
- Superior out-gas performance
- Superior gas replacement
- Fume-free welding
- Performance guarantee
Applications
- All types of bulk & special gases for semiconductor manufacture
- Gas supply lines and cylinder cabinets
- Protection for valves, regulators and flowmeters
- Particle sprinkle prevention during venting, based on the rectifications effect
There is no product catalogue for Nippon Seisen, please contact us for more details. |
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